When the golem says 'Inner Sanctum Mode Selected' you then need to push the activate mode lever (the bottom one of the three) - until you've pushed that one, the inner sanctum mode is not activated, it's just selected. You should then go ethereal. Forgive me if I'm stating the obvious and you've tried that!
If you've done that and it still hasn't worked then I'm not sure what to suggest, other than the usual tips about making sure your game is patched.
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